E-ART160 Air bearing rotary stage Rotation Stage with Air Bearings

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E-ART160 Air bearing rotary stage Rotation Stage with Air Bearings

Short Description:

● Cleanroom compatible

● Motion platform diameter 180mm to 300 mm

● Load capacity to 650N

● Eccentricity and flatness < 100 nm

● Can be mounted vertically or horizontally direct-drive, rotary air-bearing stages

● Analog and digital position feedback


Product Detail

Product Overview

FAQ

Product Tags

Product Overview

Delivers best-in-class rotational motion, helping you to optimize your high-precision process Minimizes axial-, radial-, and tilt-error motions, reducing the need for extensive post-processing of parts and measurement data

Offers excellent positioning performance and velocity stability with high-resolution feedback Features a novel, non-influencing motor design that contributes to ultra-precise motion performance Provides generous load-carrying capacity without compromising on motion quality Integrates easily into precision systems and machines due to compact, lightweight form factor, as well as horizontal and vertical mounting and load-carrying capabilities

The E-ART160 of motorized rotation stages are designed for accuracy, precision, high stiffness, and ease of use, and can be mounted in any orientation.

Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning.

The E-ART160 stages offer superior travel accuracy, flatness, and wobble performance. Because they are friction free and require no maintenance or lubrication, they are ideal for use in cleanrooms.

ART160 Direct Drive Air Floatation Stage4

● torque motor

● Brushless

● Slotless

● Low cogging torque

● Accessories and options

● Analog and digital position feedback Absolute encoder (optional) 

● Absolute encoders supply explicit position information that enables immediate determination of the position.

● Therefore, no referencing is necessary when switching on and this increases efficiency and safety during operation.

Encoder

ART160 Direct Drive Air Floatation Stage1

● Optional tip/tilt platform

● Custom mounting flanges

● PIglide filter and air preparation kits

● Single or multi-axis motion controllers and servo drives

● Base plates made of granite and systems for reducing vibration

Application fields

Optical alignment, metrology, inspection systems, calibration, scanning.


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  • Specification Parameter
    Motor torque 1.7Nm rated 3.5Nm peak
    Maximum revolution 200rpm
    Encoder 11840line
    Encoder resolution 0.55sec(The digital quantity corresponds to 0.1um, and a higher resolution of 1Vpp is optional)
    Repeatability  Accuracy ≤±1sec
    Axial max loadcapacity(5bar) 650N
    Radial max loadcapacity(5bar) 246N
    Axial max stiffness(5bar) 240N/um
    Radial max stiffness(5bar) 82N/um
    Axial max bounce <100nm
    Radial max bounce <100nm
    Air consumption 20NL/min

    ART160 Direct Drive Air Floatation Stage2

    1) What is the MOQ?
    A: MOQ is 1 pcs.
    Sample is available for customer to check the quality before bulk order.

    2) Does your product ship overseas?

    A: Yes, we ship our products internationally and have distributors in designated areas.

    3) How do I ask for a quote on a specific product?

    A:You can send a email to us , we will make a official quotation to you.

    4) Are the products customizable?

    A: We provide the ultimate engineered motion solutions for our clients. In many cases this involves customizing or configuring our standard products to a client’s unique application and specifications. Please contact us if you’re interested in customizing or configuring one of our standard products, or if you’d like to work with our engineering team to design a unique solution to meet your needs of the feedback source.  If this velocity is exceeded, the commutation initialization is no longer valid, and commutation must be reinitizlized.

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